Quartz (Silica, SiO2) is a type of glass composed solely of SiO2. It features an extremely low thermal expansion coefficient (0.5 × 10−6/°C), excellent UV transmittance, and high chemical durability. These properties make quartz an essential material not only in semiconductor processes but also in a wide range of industries such as solar cells, displays, LEDs, and aerospace.
Chunma HI-TECH customizes quartz materials to meet customer requirements, selecting optimal processes to produce various shapes. In particular, the company specializes in manufacturing high-purity quartzware (QUARTZ WARE) for critical semiconductor processes.
Semiconductor processes that require resistance to high temperatures and corrosive chemical reactions represent one of the most critical applications of quartz glass. Semiconductor quartz is used as consumables inside process chambers or as focus rings that fix wafers during etching. These components or parts used in semiconductor applications are collectively referred to as QUARTZ WARE.
The quality and precision of QUARTZ WARE directly impact the production yield of semiconductor products. Chunma HI-TECH produces high-precision QUARTZ WARE to meet these exacting standards.
Semiconductors are often referred to as the "rice of industry" due to their essential role in fields such as electronics, machinery, and information and communication technology. As the demand for high performance, miniaturization, and high integration increases, the technological challenges of semiconductor processes grow, and process components require higher precision and defect-free manufacturing. Semiconductors are produced by repeatedly performing five core processes—Diffusion, Thin Film, Photo, Etching, and CMP & Cleaning—hundreds of times to build intricate circuits on wafers. Chunma HI-TECH specializes in manufacturing high-precision quartz components used in these critical semiconductor processes.
The DIFFUSION process alters the electrical properties of semiconductors by doping impurities into the wafer surface. This is achieved by either introducing impurity gas or depositing impurity materials onto the substrate within a chamber. Using the principle of diffusion, this process is termed the DIFFUSION process. During this process, QUARTZ BOATS, which hold wafers inside the chamber, are used. The large tube-shaped quartz components used to perform the process on mounted boats are referred to as QUARTZ TUBES.
